Understanding chemistry in the plasmas involving water vapor

In order to understand plasma chemistry in the plasmas which contain water vapor, we construct a mode for describe chemical reactions involved in such plasmas. As described in many published reports on the plasma involving water, OH radicals are regarded as important species for oxidation or the other treatment of materials. However, their life-time is known to be very short. In order to know actual life time in after glow and diffusion length from discharge area, we have performed zero and one dimensional calculation of the density of major species in the plasma.