One Dimensional CCP Model using COMSOL

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Electron density

Ion density
Electron density near the RF and GND electrodes is modulated by the applied RF voltage. Ion density is not modulated because of their heavier mass.

Electric field

Ionization rate
High electric field is formed only near the electrode (sheath reagion) where the electron density is modulated. Ionization occurs where and when sufficient electric field and electron density exist.
The mph file for this model is available here (for COMSOL ver 3.5a).