Quadsphere ICP Model using COMSOL

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Phi-component of vector potential A	Phi-component of electric field E
Phi-component of vector potential A is induced by RF current flowing in the coil.	Phi-component of electric field E is dA/dt.
Electron density	Ion density
Radial profile of the electron density is static, because dynamics related to charged particles are induced by phi component of electromagnetic field.	Situation of the radial profile of the ion densityis also the same to that of electron density.
Potential	Ionization rate
Situation of the radial profile of the potential is also the same to that of electron density.	Ionization and the other electron impact reactions occur at around the inner front of the coil.
The mph file for this model is available here (for COMSOL ver 3.5a).