Sheath on a riverse tapered mask: COMSOL Model

This model is constructed by suggestion by Dr. S. Takahashi (Prof. Noda Lab. in Kyoto Univ.), who has published following article; S. Takahashi, M. Okano, M. Imada and S. Noda: Three-dimensional photonic crystals based on double-angled etching and wafer-fusion techniques, Appl. Phys. Lett., 89, 123106 (2006) This model has been expanded for practical application by Dr. K. Denpoh (TEL-AT). He has published following articles; K. Denpoh and T. Shirafuji: Modification of semianalytical finite element model for radio frequency sheaths in single- and dual-frequency capacitively coupled plasmas:II. Effects of nonuniform bulk plasma density and charging at dielectric surface, Jpn. J. Appl. Phys., 50, 036001 (6pp) (2011). K. Denpoh and T. Shirafuji: Modification of semianalytical finite element model for radio frequency sheaths in single- and dual-frequency capacitively coupled plasmas: Incorporating ion density oscillation at low frequency, Jpn. J. Appl. Phys., 49, 056202 (4pp) (2010). K. Denpoh and T. Shirafuji: Semianalytical finite element method model for radio frequency sheaths in single- and dual-frequency capacitively coupled plasmas, Jpn. J. Appl. Phys., 48, 090209 (3pp) (2009).
ne = 1017 /m3	ne = 1018 /m3
mph files (for COMSOL 3,3, 3.5a, 4.2) for this model is available here.